| 摘要 |
FIELD: chemistry. ^ SUBSTANCE: in the method, micromechanical devices are made by directly joining two parts; one of the parts (12) is made from silicon and the other from material selected from a group consisting of silicon and semiconductor ceramic or oxide material; the joint between the parts forms a cavity (14) which houses functional elements of the device (11), possible auxiliary elements and a coating (13) made from gas-absorbent material. ^ EFFECT: invention enables to obtain micromechanical devices in which detachment of coatings made from gas-absorbent materials on silicon substrates is prevented owing to direct bonding. ^ 15 cl, 2 dwg |
