| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of determining a needle mark, which can more accurately determine whether marks formed on electrode pads of devices are probe needle marks, thereby significantly reduces erroneous determination of the marks as the probe needle marks. SOLUTION: The method of determining a needle mark includes a process of giving scores, which are used to determine quality of marks as probe needle marks, to marks formed on a plurality of electrode pads P of a plurality of devices D, and selecting, based on the scores, an object device D including an object electrode pad 2P with an indefinite mark formed thereon, and a process of selecting four comparison devices Db preceding the object device D and nine comparison devices Da following the object device D temporally continuously along a test direction, and determining if the indefinite mark 2P of the object device D is good or bad as a probe needle mark, by comparing an added value of the score given to the indefinite mark 2P of the object device D and scores given to marks 2P formed on the comparison electrode pad P corresponding to the object electrode pad D of the comparison devices Db, Da, with a reference value. COPYRIGHT: (C)2011,JPO&INPIT |
