SUBSTRATE COATING APPARATUS AND SUBSTRATE COATING METHOD

摘要

PURPOSE: A substrate coating unit and a method are provided to proceed a coating process from the tip end of a substrate while preventing the drying of a nozzle tip end. CONSTITUTION: A substrate coating unit comprises the following: a flotation stage(10) elevating a substrate using a pressure vapor layer, after forming the pressure vapor layer on a stage surface penetrated by a gas streams passing through gas holes on the stage surface; a treatment solution supplier spreading a treatment solution on the substrate using a nozzle; and a gas streams controller.