发明名称 |
MEMS RESONATOR ARRAY STRUCTURE AND METHOD OF OPERATING AND USING SAME |
摘要 |
<p>A MEMS array structure including a plurality of bulk mode resonators may include at least one resonator coupling section disposed between the plurality of bulk mode resonators. The plurality of resonators may oscillate by expansion and/or contraction in at least one direction/dimension. The MEMS array structure may include a plurality of sense electrodes and drive electrodes spaced apart from the plurality of bulk mode resonators by a gap. The MEMS array structure may further include at least one anchor coupling section disposed between the at least one resonator coupling section and a substrate anchor.</p> |
申请公布号 |
EP2235822(A1) |
申请公布日期 |
2010.10.06 |
申请号 |
EP20080862406 |
申请日期 |
2008.11.26 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
LUTZ, MARKUS;PAN, ZHIYU;PARTRIDGE, AARON |
分类号 |
H03H9/46;H03H9/02;H03H9/24;H03H9/50 |
主分类号 |
H03H9/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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