发明名称 COATING FILM FORMING METHOD AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a forming method of a coating film which simplifies a droplet coating step on a material to be coated and which is capable of forming a desired coating film on the material to be coated, and to provide a method for manufacturing a piezoelectric element which is capable of easily manufacturing a piezoelectric element with high reliability by using the forming method of the coating film. <P>SOLUTION: The forming method of the coating film comprises discharging a resist liquid Q from an inkjet head 500 to a piece 2 of the piezoelectric element having the upper face 27, the side face 28, and the corner part A where they cross by the discharge method to form the coating film (resist film) on the piece 2 of the piezoelectric element. The resist liquid Q is discharged so that the liquid may collide with the corner part A from the normal line direction (z axis direction) of the upper face 27, and the resist liquid Q sheared at the corner part A flows down on the side face 28. Thus, the resist film is formed on the side face 28. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010214340(A) 申请公布日期 2010.09.30
申请号 JP20090067080 申请日期 2009.03.18
申请人 SEIKO EPSON CORP 发明人 NODA YOICHI
分类号 B05D1/26;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/29;H03H3/02 主分类号 B05D1/26
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