| 摘要 |
In an X-ray diffraction method using the parallel beam method, an X-ray parallel beam (24) is incident on a sample (26), and diffracted X-rays (28) from the sample (26) are reflected at a mirror (18) and thereafter detected by an X-ray detector (20). The reflective surface (19) of the mirror (18) consists of a combination of plural flat reflective surfaces (46, 48). The respective centers of the flat reflective surfaces (46, 48) are located on an equiangular spiral having a center that is located on a surface of the sample (26). The X-ray detector (20) is one-dimensional position-sensitive in a plane parallel to the diffraction plane. X-rays that have been reflected at different flat reflective surfaces (46, 48) reach different points on the X-ray detector (20) respectively. A corrective operation is performed for separately recognizing the different reflected X-rays on the assumption that the different reflected X-rays that have been reflected at the different flat reflective surfaces (46, 48) might be unfortunately mixed each other on the same detecting region of the X-ray detector (20). This X-ray diffraction method is superior in angular resolution, and is small in X-ray intensity reduction, and is simple in structure. |
