发明名称 |
METHOD FOR FABRICATING SUPER-HYDROPHILICITY SURFACE AND METAL SUBSTRATE WITH THE SUPER-HYDROPHILICITY SURFACE BY THE SAME METHOD |
摘要 |
PURPOSE: A method for processing a super-hydrophilic surface and a metal base with the super-hydrophilic surface are provided to obtain the contact angle of the surface, which is less than 10 degrees, by forming nano-scale fine holes on the surface of the metal base. CONSTITUTION: Micro-scale fine concavo-convexes are formed on the surface of a metal base by plasma-etching the surface of the metal base(S1). A plasma-etching process is performed using a mixed gas of argon, chlorine, boron trichloride gases under the power between 100W and 500W for 3 to 10 minutes. Nanoscale fine holes are formed on the surface of the metal base by cathode-oxidizing the surface of the metal base(S2).
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申请公布号 |
KR20100101976(A) |
申请公布日期 |
2010.09.20 |
申请号 |
KR20090020448 |
申请日期 |
2009.03.10 |
申请人 |
POSTECH ACADEMY-INDUSTRY FOUNDATION |
发明人 |
KIM, DONG SEOB;HWANG, WOON BONG |
分类号 |
H01L21/3065;C25D11/02 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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