发明名称 METHOD FOR FABRICATING SUPER-HYDROPHILICITY SURFACE AND METAL SUBSTRATE WITH THE SUPER-HYDROPHILICITY SURFACE BY THE SAME METHOD
摘要 PURPOSE: A method for processing a super-hydrophilic surface and a metal base with the super-hydrophilic surface are provided to obtain the contact angle of the surface, which is less than 10 degrees, by forming nano-scale fine holes on the surface of the metal base. CONSTITUTION: Micro-scale fine concavo-convexes are formed on the surface of a metal base by plasma-etching the surface of the metal base(S1). A plasma-etching process is performed using a mixed gas of argon, chlorine, boron trichloride gases under the power between 100W and 500W for 3 to 10 minutes. Nanoscale fine holes are formed on the surface of the metal base by cathode-oxidizing the surface of the metal base(S2).
申请公布号 KR20100101976(A) 申请公布日期 2010.09.20
申请号 KR20090020448 申请日期 2009.03.10
申请人 POSTECH ACADEMY-INDUSTRY FOUNDATION 发明人 KIM, DONG SEOB;HWANG, WOON BONG
分类号 H01L21/3065;C25D11/02 主分类号 H01L21/3065
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