| 摘要 |
Disclosed is an end effector (6, 7) configured to be mounted on the arm of a robot (1). The end effector is provided with: a plurality of blade members (9, 10, 12, 13) which are configured such that each of the end effectors can hold a substrate and that the blade interval between the blade members can be changed; a blade supporting section (8, 11) which supports the blade members and is integrally driven with the blade members (9, 10, 12, 13) by means of the robot; and a blade driving means (17, 18) which changes the blade interval by moving at least one of the blade members (9, 10, 12, 13) with respect to the other blade member. |
