| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a magnetic recording medium having a satisfactory rectangularity of pattern and a small magnetic spacing. SOLUTION: The method of manufacturing the magnetic recording medium includes forming a magnetic recording layer; an oxidation inhibiting layer, and a hard mask layer including carbon on a substrate, coating the hard mask layer with a resist, and transferring patterns of protrusions and recesses to the resist by imprinting to form resist patterns; sequentially performing etching of the hard mask layer using the resist patterns as masks; etching the oxidation inhibiting layer; and etching and/or magnetism deactivation of the magnetic recording layer to form patterns of the magnetic recording layer, and sequentially performing stripping of the resist patterns; stripping of the hard mask layer and stripping of the oxidation inhibiting layer. Ion beam etching is used for stripping the anti-oxidation layer. COPYRIGHT: (C)2010,JPO&INPIT
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