IN-PLANE 3 DEGREE-OF-FREEDOM POSITIONING STAGE

摘要

PURPOSE: A stage with planar 3-DOFs(Degrees Of Freedom) is provided to reduce motion errors by independently enabling translation and rotational motion. CONSTITUTION: A stage(1) with planar 3-degrees of freedom comprises a translation unit(100), a rotational motion unit(200), and a stage base(300). The translation unit has translational 2-DOFs. The rotational motion unit moves independently with the translation unit and has a rotational 1-DOF. The translation unit and the rotational motion unit are installed on the stage base. The stage base has an internal fixing unit and an external drive unit.