发明名称 MANUFACTURING METHOD OF RADIATION DETECTING APPARATUS, AND RADIATION DETECTING APPARATUS AND RADIATION IMAGING SYSTEM
摘要 The object of the invention is to realize a light radiation-detecting apparatus including a step of preparing a matrix array including a substrate, an insulating layer arranged on the substrate, a plurality of pixels arranged on the insulating layer, wherein the pixel includes a conversion element converting an incident radiation into an electric signal, and connection electrode arranged at a periphery of the plurality of pixels, fixing a flexible supporting member for covering the plurality of pixels to the matrix array at a side opposite to the substrate, and releasing the substrate from the matrix array.
申请公布号 EP2223339(A2) 申请公布日期 2010.09.01
申请号 EP20080848253 申请日期 2008.11.04
申请人 CANON KABUSHIKI KAISHA 发明人 ISHII, TAKAMASA;MOCHIZUKI, CHIORI;WATANABE, MINORU
分类号 H01L27/148 主分类号 H01L27/148
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