| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To remarkably improve the whole throughput by shortening tact time during laser beam machining. <P>SOLUTION: The laser beam machining process is performed at the time before and after a stage is moved at a constant speed, that is, at both or either of accelerating time until the stage reaches a constant speed and decelerating time until the stage is stopped. In such a case, the laser power and laser frequency during the laser beam machining process are controlled in accordance with the moving speed of the stage. For example, during the acceleration time when the speed of the stage is gradually accelerated and becomes the constant speed v0, the laser frequency is made gradually larger in accordance with the increase of the speed of the stage and also controlled so as to gradually release the laser power which is suppressed at the maximum. Meanwhile, during deceleration until the speed of the stage become zero, by making the laser frequency smaller gradually in accordance with the decrease of the speed of the stage and also performing control to make the suppressed value of the laser power larger gradually, the laser beam machining process is performed. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
