| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem that a phenomenon that Au of a corrosion resistance film (Au/Cr film) is eluted around the place of the Au plating to cause etching of the place while etching the crystal substrate is seen in a frequency coarse adjustment part, and this place of the crystal piece is also etched while etching a crystal substrate, resulting in the loss of a crystal piece. <P>SOLUTION: In a method for manufacturing a tuning fork vibrator, a metal film (Au plating) for frequency adjustment is formed at the frequency coarse adjustment part of the tuning fork vibrator, after a process for forming the corrosion resistance film (Au/Cr film) on the crystal substrate and before a process for making the corrosion resistance film (Au/Cr film) correspond to the external shape of the tuning fork vibrator. <P>COPYRIGHT: (C)2010,JPO&INPIT |
