METHOD AND SYSTEM FOR DETERMINING A SUPPRESSION FACTOR OF A SUPPRESSION SYSTEM AND A LITHOGRAPHIC APPARATUS,申请号KR20107012535-传众专利搜索

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发明名称	METHOD AND SYSTEM FOR DETERMINING A SUPPRESSION FACTOR OF A SUPPRESSION SYSTEM AND A LITHOGRAPHIC APPARATUS
摘要
申请公布号	KR20100093558(A)	申请公布日期	2010.08.25
申请号	KR20107012535	申请日期	2008.11.06
申请人	ASML NETHERLANDS B.V.	发明人	SCHIMMEL HENDRIKUS GIJSBERTUS;VAN EMPEL TJARKO ADRIAAN RUDOLF;FRERIKS JOHANNES MARIA;VAN DE VIJVER YURI JOHANNES GABRIEEL;SWINKELS GERARDUS HUBERTUS PETRUS MARIA;HAAST MARC ANTONIUS MARIA;VERSTEEG WENDELIN JOHANNA MARIA;JONKERS PETER GERARDUS;LABETSKI DZMITRY
分类号	H01L21/027;G03F7/20	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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