MANUFACTURING METHOD OF BOLOMETRIC DETECTOR

摘要

PROBLEM TO BE SOLVED: To provide a functional bolometric detector that has a high sensitivity and is optimized in respect of signal-to-noise ratio using a manufacturing method that can be easily performed and can be industrialized at a low cost. SOLUTION: This manufacturing method is designed for manufacturing the bolometric detector including a membrane (1) suspended above a substrate using a heat insulation arm fixed to the substrate at a fixing point. The membrane (1) has a thin layer (9) sensitive to heat having base containing at least semiconductive ferrous oxide. This method includes at least a local reduction and/or oxidation of the thin layer (9) of semiconductive ferrous oxide to change the degree of oxidation of iron atoms of a part of the thin layer (9) of semiconductive ferrous oxide. COPYRIGHT: (C)2010,JPO&INPIT