发明名称 FINE STRUCTURE TRANSFER DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a fine structure transfer device allowing transfer repeatedly by the same stamper, without damaging the stamper and an object to be transferred. SOLUTION: This fine structure transferring device A1 brings the stamper 2 formed with a fine irregular pattern into contact with the object 1 to be transferred, and transfers the fine irregular pattern of the stamper 2 onto a surface of the object 1 to be transferred. The fine structure transferring device A1 includes a holding mechanism 3 for holding the whole circumference of an outer circumferential part of the object 1 to be transferred, and the holding mechanism 3 holds the object 1 to be transferred, so as to make a distance between the holding mechanism 3 and the stamper 2 substantially equal to a distance between the object 1 to be transferred and the stamper 2, or so as to position the object 1 to be transferred to the stamper 2 side more than the holding mechanism 3. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010167643(A) 申请公布日期 2010.08.05
申请号 JP20090011474 申请日期 2009.01.22
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 WASHITANI RYUTA;OGINO MASAHIKO;SHIZAWA NORITAKE;MORI KYOICHI;MIYAUCHI AKIHIRO
分类号 B29C59/02;H01L21/027 主分类号 B29C59/02
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