MEMS DEVICES AND REMOTE SENSING SYSTEMS UTILIZING THE SAME

摘要

A remote sensing system comprises a micro-electromechanical sensor (MEMS) device comprising a sensing element, an exciting element to resonate the sensing element at resonant frequency from a remote location by transmitting signals comprising any of acoustic signals, optical signals, radio frequency signals, or magnetic induction signals, and a reader circuitry to read an original frequency of the sensing element from a remote location for determining a condition to which the MEMS device is exposed using signals comprising any of acoustic signals, optical signals, radio frequency signals, or magnetic induction signals.