| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspecting tool that shortens setup time when a product name is changed, and to provide a substrate inspecting apparatus that has the inspecting tool and reduces the error specific to the substrate inspecting apparatus. SOLUTION: This inspecting tool 32 includes a plurality of inspection probes 35 for inspecting a wiring pattern while they are brought into contact with inspection points of the wiring pattern of an inspection substrate 21, and is attached to the substrate inspecting apparatus 1 and used. The inspecting tool includes a holding plate 32H for holding the plurality of inspection probes, and a storing means 37 into which data is written and read by a controller 11 of the substrate inspecting apparatus 1. The holding plate 32H includes a tool positioning mark 36A for positioning the inspecting tool. COPYRIGHT: (C)2010,JPO&INPIT |
