| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To a laser beam machining apparatus for forming a working area where the cross-sectional shape of a laser beam at a converging point is extended in one direction to a workpiece. <P>SOLUTION: As for a cylindrical lens 4, a laser beam L1 is made to diverge in the Y-axis direction (that is, on the YZ-plane) and is not made to diverge and converged in the X-axis direction (that is, on the ZX-plane) with. As for an objective lens 5, the laser beam L1 emitted from the cylindrical lens 4 is converged at a point P1 in the Y-axis direction and converged at a point P2 in the X-axis direction with. Furthermore, as for a pair of knife edges 13, the divergence angleθof the laser beam L1 which is made incident on the objective lens 5 is adjusted in the Y-axis direction. In this way, the cross-sectional shape of the laser beam L1 is a long-size shape extended in the Y-axis direction at the point P2 and the maximum length in the Y-axis direction is adjusted. Therefore, by locating the point P2 on the surface of the workpiece S, the long-size-shaped working are extended by a desired length in the Y-axis direction is formed on the surface of the workpiece S. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
