| 摘要 |
A vertical boat 10 for heat treatment comprising a top plate 1, a bottom plate 2, and a column member fixed between the top plate and the bottom plate, a plurality of grooves 8 being formed in the column member, and a supporting part for horizontally supporting a wafer-like body to be treated being formed between the grooves, wherein, as the column member, two or more column members 3 and 4, each of which has a circular arc-shaped cross section and has the supporting parts in the shape of circular arc formed integrally inside by formation of the grooves, are cylindrically disposed, and the wafer-like body to be treated is inserted from the grooves of the column members and supported along a circumferential part of a lower surface thereof by the respective circular arc-shaped supporting parts. Thereby, there is provided a vertical boat for heat treatment that can effectively prevent a slip from being generated on a wafer and such during heat treatment, has low material cost, and is relatively easily produced. |
