| 摘要 |
PURPOSE: A probe conditioning system in a device for measuring sheet resistance is provided to improve measuring accuracy and equipment operation ratio by automatically performing a probe conditioning work. CONSTITUTION: A probe conditioning system in a device for measuring sheet resistance is composed as follows. A wafer stage(100) places a wafer and changes the position of the wafer. A probe(20) with multiple needles measures voltage by being in contact with the wafer. A prove driving shaft(30) powers the probe up and down. A circular-shaped conditioning plate(40) is inserted into the center surface of the wafer stage. |
