发明名称 |
Microelectromechanical system |
摘要 |
<p>The invention relates to microelectromechanical systems (MEMS), and more particularly, to MEMS switches using magnetic actuation. The MEMS switch may be actuated with no internal power consumption. The switch is formed in an integrated solid state MEMS technology. The MEMS switch is micron and/or nanoscale, very reliable and accurate. The MEMS switch can be designed into various architectures, e.g., a cantilever architecture and torsion architecture. The torsion architecture is more efficient than a cantilever architecture.</p> |
申请公布号 |
EP2204831(A2) |
申请公布日期 |
2010.07.07 |
申请号 |
EP20100150053 |
申请日期 |
2010.01.04 |
申请人 |
STMICROELECTRONICS ASIA PACIFIC PTE LTD. |
发明人 |
MIN, TANG;LIAO, EBIN;NOVIELLO, GIUSEPPE;ITALIA, FRANCESCO |
分类号 |
H01H50/00 |
主分类号 |
H01H50/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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