摘要 |
A gas sensor for detecting environmentally harmful gases is provided. The sensor includes an insulating substrate, a metal electrode formed on the insulating substrate, and a sensing layer formed on the metal electrode and including a semiconductor oxide (Lan+1NinO3n+1(n=1,2,3)) nanofiber. Therefore, a semiconductor oxide (Lan+1NinO3n+1(n=1,2,3)) has an ABO3-type basic crystalline structure and thus is stable in structure, and is a representative material having a nonstoichiometric composition due to oxygen defects. Since the semiconductor oxide has great oxygen defects on its surface, a great change in electrical resistance may be exhibited due to reactive gas adsorption and oxidation/reduction reaction on the oxide surface. Also, a method of fabricating the gas sensor is provided.
|