发明名称 METHOD OF FABRICATING SEMICONDUCTOR OXIDE NANOFIBERS FOR SENSOR AND GAS SENSOR USING THE SAME
摘要 A gas sensor for detecting environmentally harmful gases is provided. The sensor includes an insulating substrate, a metal electrode formed on the insulating substrate, and a sensing layer formed on the metal electrode and including a semiconductor oxide (Lan+1NinO3n+1(n=1,2,3)) nanofiber. Therefore, a semiconductor oxide (Lan+1NinO3n+1(n=1,2,3)) has an ABO3-type basic crystalline structure and thus is stable in structure, and is a representative material having a nonstoichiometric composition due to oxygen defects. Since the semiconductor oxide has great oxygen defects on its surface, a great change in electrical resistance may be exhibited due to reactive gas adsorption and oxidation/reduction reaction on the oxide surface. Also, a method of fabricating the gas sensor is provided.
申请公布号 US2010155691(A1) 申请公布日期 2010.06.24
申请号 US20090536664 申请日期 2009.08.06
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 LEE SU JAE;PARK JIN AH;MOON JAEHYUN;ZYUNG TAE HYOUNG
分类号 H01L29/66;H01L21/36 主分类号 H01L29/66
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