BENZOXAZOLE RESIN PRECURSOR, POLYBENZOXAZOLE RESIN, RESIN MEMBRANE, AND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a benzoxazole resin precursor from which a resin membrane having small micropores is obtained, the resin membrane having small micropores and a low dielectric constant, and a semiconductor device using the resin membrane. SOLUTION: The benzoxazole resin precursor has an active ester group or a carboxyl group. The polybenzoxazole resin is obtained by reacting the benzoxazole resin precursor. The resin membrane is made of a resin composition containing the polybenzoxazole resin. The semiconductor device has the resin membrane. COPYRIGHT: (C)2010,JPO&INPIT