摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor light-receiving element with an integrated waveguide, for suppressing a decrease in mechanical strength during a manufacturing process and an increase in manufacturing cost. Ž<P>SOLUTION: In the semiconductor light-receiving element with an integrated waveguide, light transmitted via a ridge type optical waveguide 120 in the direction parallel to a surface of a semiconductor substrate is entered in a semiconductor light-receiving element 110, and is reflected downward on a forward mesa reflecting surface 130B opposite from a surface 130A where the semiconductor light-receiving element 110 is in contact with the optical waveguide 120. The light reflected in the direction of the semiconductor substrate is detected by the semiconductor light-receiving element 110 and converted to an electrical signal. The electrical signal generated in the semiconductor light-receiving element 110 is extracted from an electrode (not shown) connected to an N-type contact forming part 140 and a P-type contact forming part 150 to an external circuit. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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