| 摘要 |
FIELD: machine building. ^ SUBSTANCE: procedure consists in padding loading into reactor, in padding heating and in transporting vapours of precursor into zone of reactor. The process is carried out till metal film of required thickness is formed on the padding. Also the padding is heated to temperature 50-70C; vapours of precursor are supplied into the zone of reaction at temperature 25-50C in mixture with hydrogen; the padding is subject to ultra-violet radiation in the range of wave length 126-172 nm. Notably, flow of hydrogen is supplied at rate 0.3-4.0 l/h, while vapours of precursor are supplied at rate 2-4 l/h by means of transporting gas argon. ^ EFFECT: simplification of procedure, expanded functionality, and upgraded quality of coating. ^ 4 cl, 4 ex |
