| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To easily develop or verify an application program corresponding to the combination of desired substrates even if there is no unit made by combining various substrates. <P>SOLUTION: A substrate simulation device 12 simulates operations of the substrate for a control CPU 11 to make communications in order to monitor the state of an object. A plurality of substrate simulation parts 21-24 simulate the operations of the plurality of substrates of different types, respectively. A substrate selection part 25 selects the substrate simulation part which should be validated for communications with the control CPU 11 among the plurality of substrate simulation parts 21-24. A data set part 26 sets up the data which should be transmitted to the control CPU 11 from the substrate simulation part selected by the substrate selection part 25. A communication part 27 transmits the data set up by the data set part 26 to the control CPU 11 from the substrate simulation part selected by the substrate selection part 25. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
