| 摘要 |
PROBLEM TO BE SOLVED: To provider a capacitance type environmental harmful gas sensor with excellent gas reaction profiles, such as high sensitivity, high selectivity, fast response speed, and long-term stability, to solve the problem that a manufacturing process is complex when the conventional oxide semiconductor gas sensor is manufactured, and a manufacturing method thereof. SOLUTION: The capacitance type environmental harmful gas sensor includes an insulating substrate, a metallic electrode and a micro thin-film heater heating wire that are integrally formed on the same plane of the insulating substrate, and an oxide sensing layer coated on the metallic electrode and the micro thin-film heater heating wire, and the method for manufacturing therefor includes the steps of etching a metallic layer after vapor depositing the metallic layer so that an inter-digital transducer is formed mutually by the metallic electrode and the micro thin-film heater heating wire and forming an oxide sensing layer continuously. This capacitance type environmental harmful gas sensor is capable of securing excellence in a manufacturing process and has high sensitivity, high selectivity, high stability, and low electric power. COPYRIGHT: (C)2010,JPO&INPIT |
