发明名称 |
STRUCTURES OF AND MEHTODS FOR FORMING VERTICALLY ALIGNED SI WIRE ARRAYS |
摘要 |
<p>A structure consisting of vertically aligned wire arrays on a Si substrate and a method for producing such wire arrays. The wire arrays are fabricated and positioned on a substrate with an orientation and density particularly adapted for conversion of received light to energy. A patterned oxide layer is used to provide for wire arrays that exhibit narrow diameter and length distribution and provide for controlled wire position.</p> |
申请公布号 |
KR20100064360(A) |
申请公布日期 |
2010.06.14 |
申请号 |
KR20107003483 |
申请日期 |
2008.07.18 |
申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
KAYES BRENDAN M.;FILLER MICHAEL A.;LEWIS NATHAN S.;ATWATER HARRY A. |
分类号 |
H01L31/042;H01L21/205 |
主分类号 |
H01L31/042 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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