| 发明名称 |
APPARATUS FOR TRANSFERRING A SUBSTRATE |
| 摘要 |
PURPOSE: A substrate transport apparatus is provided to decrease the area required for substrate processing by transporting a steeply angled substrate using a transport belt. CONSTITUTION: A substrate transport apparatus comprises a conveyor belt(110), driving pulleys(120), a driving unit, and idle rollers. The conveyor belt supports and transports an angled flat substrate(G). The driving pulleys are connected to the conveyor belt. The driving pulleys rotate the conveyor belt to transport the substrate. The driving unit is connected to the driving pulleys. The driving unit provides torque for rotating the conveyor belt. The idle rollers are arranged along one direction of the substrate and are supported by the conveyor belt. The idle rollers support the substrate during transport.
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| 申请公布号 |
KR20100058706(A) |
申请公布日期 |
2010.06.04 |
| 申请号 |
KR20080117194 |
申请日期 |
2008.11.25 |
| 申请人 |
SEMES CO., LTD. |
发明人 |
CHOI, JAE HYUN;YOO, HA SANG |
| 分类号 |
B65G49/06;B65G39/02;H01L21/68 |
主分类号 |
B65G49/06 |
| 代理机构 |
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