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发明名称
METHODS OF PREPARING THIN FILMS BY ATOMIC LAYER DEPOSITION USING MONOCYCLOPENTADIENYL TRIAMINO ZIRCONIUM PRECURSORS
摘要
申请公布号
EP2191034(A1)
申请公布日期
2010.06.02
申请号
EP20080799401
申请日期
2008.09.10
申请人
SIGMA-ALDRICH CO.
发明人
HEYS, PETER, NICHOLAS;KINGSLEY, ANDREW;SONG, FUQUAN;WILLIAMS, PAUL;LEESE, THOMAS;DAVIES, HYWEL, OWEN;ODEDRA, RAJESH
分类号
C23C16/455
主分类号
C23C16/455
代理机构
代理人
主权项
地址
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