发明名称 |
Surface Position Detection Apparatus, Exposure Apparatus, and Exposure Method |
摘要 |
A surface position detection apparatus capable of highly precisely detecting the surface position of a surface to be detected without substantially being affected by relative positional displacement due to a polarization component occurring in a light flux having passed through a reflective surface. In the apparatus, a projection system has a projection side prism member (7) having first reflective surfaces (7b, 7c), and a light receiving system has a light receiving prism member (8) having second reflective surfaces (8b, 8c) arranged in correspondence with the projection side prism member. The surface position detection apparatus further has a member for compensating relative positional displacement due to a polarization component of a light flux having passed through the first and second reflective surfaces.
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申请公布号 |
US2010129739(A1) |
申请公布日期 |
2010.05.27 |
申请号 |
US20060988239 |
申请日期 |
2006.06.28 |
申请人 |
HIDAKA YASUHIRO;NAGAYAMA TADASHI |
发明人 |
HIDAKA YASUHIRO;NAGAYAMA TADASHI |
分类号 |
G03F7/20;G01B11/14;G03B27/54 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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