| 摘要 |
A pattern forming method includes calculating amount of curable resin to be formed on a substrate, forming curable resin having the calculated amount on the substrate, filling a pattern of the template with the curable resin on the substrate by contacting the template with the curable resin on the substrate, curing the curable resin with the template being contacted with the curable resin, forming a pattern in the cured curable resin, which includes separating the template from the cured curable resin, and forming a pattern on the substrate based on the pattern formed in the curable resin, wherein the calculating the amount of curable resin to be formed on the substrate is performed based on a relationship between density or shape of a pattern to be formed on the template and filling time for filling the pattern to be formed on the template with the curable resin.
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