| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prolong the life of a member supporting device by improving the maintainability thereof. <P>SOLUTION: The member supporting device 150 supporting a substrate 200 by supports 151 includes: support units 170 including the rod type supports 151 for supporting the substrate 200 from one surface side of the substrate 200, fixing devices 161 optionally changing between a fixed state wherein the positions of the supports 151 are fixed and a semifixed state wherein the positions of the supports 151 are not changed by their weights, but changed with external force added to the weights, and housings 162 for holding the supports 151 and fixing devices 161; and a moving body 155 for holding the plurality of support units 170 detachably, and a driving device 158 for moving the moving body 155. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
