PRECURSOR RECYCLING

摘要

The present invention provides a system for the recycling of precursor substances used in substrate treatment systems comprising at least one module in contact with a precursor substance, at least one reservoir arranged to collect the exhaust of the module and optionally at least one abatement system. The exhaust collected in the reservoir that fulfills process quality standards can then be reintroduced into the treatment system and does not need to be disposed of.