| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrating element, piezoelectric vibrator, piezoelectric oscillator, and frequency stabilizing method, capable of solving the trouble where a resonant frequency is reduced to be lower than a final target frequency with the passage of time since a silicone vapor component discharged from silicone adhesives is stuck and deposited on a metal film of the piezoelectric vibrating element, in a piezoelectric device structured to airtightly seal the piezoelectric vibrating element inside an insulated container, while holding the piezoelectric vibrating element by means of the silicone adhesives. <P>SOLUTION: A piezoelectric vibrator holds a piezoelectric vibrating element inside a container, while using a conductive bonding member, the piezoelectric vibrating element comprising a piezoelectric substrate 20 constituted of a thickness-shear piezoelectric material and a metal film 21 formed on a surface of the piezoelectric substrate. In the piezoelectric vibrator, a surface of the metal film exposed in an atmosphere is overlayed with a film 30 formed by chemisorption with a substance containing non-bonding pairs. <P>COPYRIGHT: (C)2010,JPO&INPIT |
