发明名称 GUIDING DEVICE AND GUIDING ASSEMBLY FOR GUIDING CABLE AND/OR HOSE, AND LITHOGRAPHIC APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a guide for guiding cables and/or hoses between two parts that are moveable relative to each other. <P>SOLUTION: The guide including a band having a length, width and thickness, and having a torsional stiffness about a longitudinal axis of the band, a bending stiffness about an axis in the width direction, and a shear stiffness in the thickness direction, multiple blocks fitted to the band, and a deformable member provided between two adjacent blocks, the deformable member being connected to the adjacent blocks and having a torsional stiffness about the longitudinal axis of the band, a shear stiffness in the thickness direction, and a bending stiffness about the axis in the width direction, wherein the torsional stiffness of the deformable member is substantially greater than the torsional stiffness of the band, and wherein the shear stiffness of the deformable member is substantially greater than the shear stiffness of the band. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010103526(A) 申请公布日期 2010.05.06
申请号 JP20090236749 申请日期 2009.10.14
申请人 ASML NETHERLANDS BV 发明人 KRASTEV KEASSIMIR TODOROV
分类号 H01L21/027 主分类号 H01L21/027
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