METHOD FOR FORMING CARBON NANO MATERIAL PATTERN

摘要

PURPOSE: A method for forming a carbon-nano-material pattern is provided to precisely pattern a carbon-nano-material layer using a galvanic corrosion phenomenon, based on a reduction potential difference between an oxidation induced pattern and the carbon-nano-material layer. CONSTITUTION: A part of a carbon-nano-material layer on a substrate(10) is contacted to an oxidation induced pattern(14a). The contacted carbon-nano-material layer(15a) is thermally treated under an oxidation atmosphere. A part of the contacted carbon-nano-material layer is selectively removed. The reduction potential of the oxidation induced pattern is higher than the carbon-nano-material.