| 摘要 |
PROBLEM TO BE SOLVED: To rapidly evaluate positioning accuracy of substrates. SOLUTION: This junction evaluation gage for evaluating positioning accuracy of a pair of substrates positioned and jointed to each other includes: the pair of substrates at least either of which has permeability for inspection light; a first partial pattern forming a part of a repeated pattern and formed on one side of the pair of substrates; and a second partial pattern having a pattern excluding the first partial pattern from the repeated pattern and formed on the other side of the pair of substrates. When the pair of substrates are positioned and jointed to each other, inspection light emitted to the repeated pattern formed by the first partial pattern and the second partial pattern forms diffracted light. COPYRIGHT: (C)2010,JPO&INPIT |
