摘要 |
<p>A silicon sheet producing apparatus comprising a crucible (14) containing fused silicon and a rotating cooling body (11) rotatably disposed above the crucible (14) and having at least one flat surface (1) for growing a solid silicon sheet (12) on the surface is characterized by comprising a separating/transfer out mechanism for separating a silicon sheet (12) formed on the flat surface (1) of the rotating cooling body (11) by dipping it in a fused silicon (13) by the rotation and then lifting it up from the fused silicon (13) and transferring the separated silicon sheet (12) by the inertia force by the rotation of the rotating cooling body (11) and/or the fall by the gravity out of the apparatus before the silicon sheet (12)is dipped again in the fused silicon (13). With this, a planar silicon sheet free of internal stress can be produced and the silicon sheet can be taken out continuously and stably.</p> |