| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor testing apparatus capable of preventing hang-ups of both a control device and a processing device in the event of an occurrence of an instantaneous interruption. SOLUTION: The semiconductor testing apparatus 1 includes a tester controller 10 for controlling the semiconductor testing apparatus 1, a redundancy system 20 for performing redundancy computation using a test result of a semiconductor device, and an instantaneous interruption detection device 30 for detecting the instantaneous interruption which occurs in a bus B. Once the instantaneous interruption detection device 30 outputs an interrupt signal IR indicating a detection of the instantaneous interruption, the tester controller 10 performs a software interrupt indicating the occurrence of the instantaneous interruption to a redundancy control device 40 and each of redundancy computation devices 50a to 50n included in the redundancy system 20 via the bus B. COPYRIGHT: (C)2010,JPO&INPIT
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