| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection jig easily manufactured and maintained, and a contactor used for the substrate inspection jig. SOLUTION: The contactor 2 includes: a long conductive rod member 21; a large diameter section 22 disposed on the other side; a coil spring 23 penetrated through the rod member 21; and a connection terminal 24 as a cylindrical member for accommodating the other end of the rod member 21 in its interior, and tapered at the other end. A contactor holder 3 includes: a guide hole 311 for guiding one end of the contactor 2 to an inspection point of a to-be-inspected substrate; and a connection hole 351 for guiding the other end to an electrode 41 connected to a substrate inspection apparatus, and accommodating the coil spring 23 and the connection terminal 24. The connection hole 351 has a first hole 331 whose diameter is larger than that of the rod member 21 and smaller than that of the large diameter section 22, and a second hole 332 whose diameter is larger than that of the large diameter section 22. A pitch of the guide hole 311 is smaller than that of the electrode 41. COPYRIGHT: (C)2010,JPO&INPIT |
