| 摘要 |
PROBLEM TO BE SOLVED: To support the peripheral edge of a wafer frame uniformly by the whole extension board, thereby achieving uniform wafer sheet extension when a wafer sheet onto which a wafer is stuck is extended. SOLUTION: The portion of an extension board near the split portion 10 is held vertically by means of a reinforcement member 17 along with a vertical base 4 and prevented from deformation. In particular, upward deformation of the portion near the split portion 10 of the right extension board and left extension board which are susceptible to deformation is avoided certainly, and a frame 13 is retained uniformly by the whole right extension board and left extension board, so that a wafer sheet 50 is extended uniformly. COPYRIGHT: (C)2010,JPO&INPIT |
