METHOD FOR FORMING PATTERN USING NANO IMPRINT AND MANUFACTURING METHOD OF MOLD FOR FORMING PATTERN

摘要

PURPOSE: A mold manufacturing method for a pattern casting method using nano-imprint and pattern casting molds the pattern of the multilevel form using a mold for a multi-stage imprint manufactured. It is applicable in the large area micro-pattern molding. CONSTITUTION: The polymer for the mold is patterned in the substrate patterning the ultraviolet lay blocking film and the mold is manufactured(100). The resin for imprint is spread in the formed substrate(102). The formed substrate spreading resin is pressurized to the mold and pattern is imprinted(104). Resin hardens(106). The resin for the imprint which does not harden is cleaned(108). The multi-stage pattern is shaped in the formed substrate(110).