| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve the linear responsiveness of the inclination of a mirror to a driving voltage. <P>SOLUTION: This mirror device comprises a mirror 140 pivotably supported with respect to a mirror substrate, driving electrodes 1303-1 to 4 formed on electrode substrates facing the mirror substrate, a pivot supporting the turning center of the mirror, and a control circuit which applies a voltage to the driving electrodes. The plurality of driving electrodes are formed on the electrode substrates around the pivot and generate a voltage difference between the positive side driving electrode and the negative side driving electrode while applying a bias voltage Vb. Thereby, the mirror can be turned, and the linear responsiveness of the inclinationθin relation to the driving voltage V can be improved. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
