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经营范围
发明名称
A high vacuum magnetron sputter gun
摘要
申请公布号
KR100948547(B1)
申请公布日期
2010.03.18
申请号
KR20070128045
申请日期
2007.12.11
申请人
发明人
分类号
C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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