| 摘要 |
PROBLEM TO BE SOLVED: To provide a compound seal member having vacuum sealing performance, resistance to plasma, corrosion proof gas performance or the like and capable of easily separating a first fastening member from a second fastening member even when fitted between the first fastening member and the second fastening member and used for a long time at high temperature-high pressure. SOLUTION: A first seal member 6 arranged on a seal groove bottom face 2a side of a one-sided dovetail groove 2 and a second seal member 8 arranged on an opening end face side of the one-sided dovetail groove 2 are detachably integrated in a projection/recess fitting part 10. The projection/recess fitting part 10 is constituted on a face approximately parallel with the seal groove bottom face 2a. COPYRIGHT: (C)2010,JPO&INPIT
|
