| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a glass substrate with a thin film whereby a minimally-warped glass substrate with a thin film can be manufactured easily. SOLUTION: To allow the final state of the primary face (10a) of a glass substrate (10) to be flat after a thin film is formed, a deformation step is performed, wherein the primary face (10a) of the glass substrate (10) is provided with a curved shape by means of the plastic deformation of the glass substrate (10), and a thin film formation step is performed, wherein a thin film (11) is formed on the primary face (10a) of the glass substrate (10) which has undergone plastic deformation. COPYRIGHT: (C)2010,JPO&INPIT
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