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发明名称
摘要
申请公布号	JP4433317(B2)	申请公布日期	2010.03.17
申请号	JP20060339056	申请日期	2006.12.15
申请人		发明人
分类号	C30B29/38;C30B9/10;H01L21/208	主分类号	C30B29/38
代理机构		代理人
主权项
地址

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