SUBSTRATE PROCESSING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing system which is capable of shortening a processing cycle by simplifying a system configuration. SOLUTION: The substrate processing system includes: a processing unit which performs prescribed processing on a substrate; a substrate loading unit to which a vessel for loading wherein the substrate before the prescribed processing is housed is supplied and the empty vessel for loading is recovered; a substrate unloading unit to which a vessel for unloading wherein the substrate before the prescribed processing is housed is recovered and the empty vessel for unloading is supplied; and a carrying unit which carries the vessel for loading between a loading position in the processing unit and the substrate loading unit and carries the vessel for unloading between an unloading position in the processing unit and the substrate unloading unit. COPYRIGHT: (C)2010,JPO&INPIT